谐振器材料
超声谐振器需要特殊材料,称为"声学材料"。
要求
根据应用的不同,以下因素在选择材料时可能很重要。
- 抗疲劳性。大多数超声谐振器因疲劳开裂而失效。疲劳强度高的材料可以在高应力水平(更高振幅)下运行。
- 低损耗。低损耗材料可以在高振幅下运行而不会产生过多热量。高损耗材料必须在较低振幅、较低占空比下运行,或加强冷却;否则,叠堆的频率可能向下漂移,直到电源无法再驱动叠堆。此外,高损耗材料会消耗本可用于预期应用的能量。
- 抗空化性。浸没在液体中的谐振器,如果振幅足够高,就会发生空化冲蚀。较硬的材料一般具有更好的抗空化性。详情 ……
- 耐磨性。与其他材料发生摩擦的谐振器可能出现磨损。较硬的材料一般具有更好的耐磨性。
- 抗冲击性(韧性)。嵌件植入应用需要这一性能。它不同于硬度,因为材料可能表面硬而内部软。
- 耐化学性。用于化学加工、需要用腐蚀性清洗剂清洗的谐振器(食品加工装置)、医疗器械(生理盐水冲洗、体液;带冲洗/冷却的牙科工具)。
- 屈服强度。对于冲击型应用(例如嵌件植入)以及静应力可能较高的场合(例如螺纹上),高屈服强度有助于减少变形。
- 弹性模量(E)的重现性。
弹性模量(它部分决定波速)在不同批次材料之间应具有重现性。否则,谐振器的调谐尺寸将不一致。这对钛来说是一个特别突出的问题。
- 热导率。
在必须最大限度传热的场合(例如在将压电陶瓷的热量导出的前驱动块中,以及在某些必须将热量从工件导出的塑料焊接应用中),热导率应高。在某些情况下,热导率应低(例如,为尽量减少从负载传递到压电陶瓷的热量)。
- 生物相容性。这是外科手术器械的一项要求。
- 可加工性。即材料加工的难易程度。
- 安全性。某些材料(如铍)在加工不当时会带来健康风险。
- 可获得性。
- 成本。
变幅杆和增幅杆用材料
下表列出了一些常用的谐振器材料及其特性。
点击材料名称可查看更多信息。
| 材料 |
特性 |
典型用途 |
| 钛 |
| 抗疲劳性 ----------------------------------------------------------- |
高 |
| 损耗 ----------------------------------------------------------- |
中 |
| 抗空化性 ----------------------------------------------------------- |
中 |
| 耐磨性 ----------------------------------------------------------- |
中 |
| 抗冲击性 ----------------------------------------------------------- |
中 |
| 耐化学性 ----------------------------------------------------------- |
视情况而定 |
| 屈服强度 ----------------------------------------------------------- |
中 |
| 弹性模量 E 的重现性 ----------------------------------------------------------- |
中 |
| 热导率 ----------------------------------------------------------- |
低 |
| 生物相容性 ----------------------------------------------------------- |
高 |
| 可加工性 ----------------------------------------------------------- |
中 |
| 成本 ----------------------------------------------------------- |
高 |
注:小孔可能难以攻丝,因为钛容易咬住丝锥。
|
- 塑料焊接和金属焊接用高振幅变幅杆
- 医用探头
- 液体处理
- 食品工业用变幅杆
- 增幅杆(高增益)
|
| 铝 |
| 抗疲劳性 ----------------------------------------------------------- |
中 |
| 损耗 ----------------------------------------------------------- |
低 |
| 抗空化性 ----------------------------------------------------------- |
低 |
| 耐磨性 ----------------------------------------------------------- |
低 |
| 抗冲击性 ----------------------------------------------------------- |
低 |
| 耐化学性 ----------------------------------------------------------- |
视情况而定 |
| 屈服强度 ----------------------------------------------------------- |
中 |
| 弹性模量 E 的重现性 ----------------------------------------------------------- |
高 |
| 热导率 ----------------------------------------------------------- |
高 |
| 生物相容性 ----------------------------------------------------------- |
低 |
| 可加工性 ----------------------------------------------------------- |
高 |
| 成本 ----------------------------------------------------------- |
低 |
|
- 变幅杆(尤其是较大的变幅杆)
- 增幅杆(中、低增益)
- 换能器前驱动块
|
| 工具钢 |
| 抗疲劳性 ----------------------------------------------------------- |
高 |
| 损耗 ----------------------------------------------------------- |
高应力下高 |
| 抗空化性 ----------------------------------------------------------- |
高 |
| 耐磨性 ----------------------------------------------------------- |
高 |
| 抗冲击性 ----------------------------------------------------------- |
高 |
| 耐化学性 ----------------------------------------------------------- |
视情况而定 |
| 屈服强度 ----------------------------------------------------------- |
高 |
| 弹性模量 E 的重现性 ----------------------------------------------------------- |
高 |
| 热导率 ----------------------------------------------------------- |
中 |
| 生物相容性 ----------------------------------------------------------- |
低 |
| 可加工性 ----------------------------------------------------------- |
中 |
| 成本 ----------------------------------------------------------- |
中 |
|
|
| 不锈钢 |
| 抗疲劳性 ----------------------------------------------------------- |
中 |
| 损耗 ----------------------------------------------------------- |
高应力下高 |
| 抗空化性 ----------------------------------------------------------- |
高 |
| 耐磨性 ----------------------------------------------------------- |
高 |
| 抗冲击性 ----------------------------------------------------------- |
高 |
| 耐化学性 ----------------------------------------------------------- |
视情况而定 |
| 屈服强度 ----------------------------------------------------------- |
高 |
| 弹性模量 E 的重现性 ----------------------------------------------------------- |
中 |
| 热导率 ----------------------------------------------------------- |
中 |
| 生物相容性 ----------------------------------------------------------- |
高 |
| 可加工性 ----------------------------------------------------------- |
中 |
| 成本 ----------------------------------------------------------- |
中 |
|
- 块形变幅杆,尤其是需要将端头钎焊或焊接到变幅杆上的场合
- 某些医用探头
- 换能器后驱动块
|
| 铜合金 |
|
|
| 陶瓷 |
脆性 |
|
| Ferro-Tic |
可加工碳化物 |
|
| 铌 (Nb) |
- 杨氏模量在 20-1200 °C 范围内保持恒定。(Eskin[1],第 299 页)因此,与其他声学材料不同,谐振器的频率在该温度范围内保持相对恒定。
- 细杆波速约为 3460 m/sec,因此其调谐长度比大多数声学材料(约 5000 m/sec)短约 30%。
|
|
| 钨 |
杨氏模量和密度约为钢的 3 倍。 |
|
| AlBeMet® |
- 低泊松比(0.17)和长细杆半波长(20 kHz 时为 240 mm)带来优异的振幅均匀性。
- 昂贵
|
|
上表假定材料已经过(适当的)热处理以获得最佳性能。
注 ——
- 对于钛和铝,损耗近似随应力(振幅)的平方增加。对于大多数其他材料,损耗增加得明显更快。因此,虽然这些其他材料在较低振幅下可能表现尚可,但在较高振幅下其损耗可能过大。
- 大多数声学金属的波速接近 5000 m/sec(约 200,000 英寸/秒)。然而,铜基材料(例如黄铜)的波速明显更低,因此调谐长度更短。
某些钛合金可以选择以获得更低的波速。
换能器用材料
除上述材料外,以下材料可用作换能器的零部件。
- 压电陶瓷
- 铁磁材料 - 镍、Premendur
- 电极材料 - 镍、黄铜、铜、铍铜
- 绝缘体 - MACOR 可加工陶瓷
- 钨
用于耐磨或外观的材料
除 D-gun 和碳化物外,以下材料的镀层很薄,不会影响调谐。
Resonator materials
Contents
- Tables
- Table 1. Materials for horns and boosters
Ultrasonic resonators require special materials, referred to as "acoustic materials".
Requirements
The following factors may be important in choosing the material, depending on the application.
- Fatigue resistance. Most ultrasonic resonators
fail by fatigue cracking. Materials with high
fatigue strength can be run at high stress levels (higher amplitudes).
- Low loss. Materials with low loss can be run
at high amplitudes without generating excessive heat. Materials with high loss must
be run at lower amplitudes, at lower duty cycles, or with increased cooling; otherwise, the frequency of the stack may drift downward until the power supply
can no longer drive the stack. Additionally, materials with high loss consume energy
that would otherwise be available for the intended application.
- Cavitation resistance. Resonators that are
immersed in liquids will experience cavitation erosion if the amplitude is high
enough. Harder materials generally have better cavitation resistance. Details ...
- Wear resistance. Resonators that rub against
other materials may experience wear. Harder materials generally have better wear
resistance.
- Impact resistance (toughness). Required for inserting applications.
This is not the same as hardness since a material may be hard on the surface but soft underneath.
- Chemical resistance. For
chemical processing, resonators that need to be cleaned with
caustics (food processing installations), medical devices
(saline irrigation, body fluids; dental tools with
irrigation/cooling).
- Yield strength. High yield strength
is desirable to reduce deformation for impact-type applications
(e.g., inserting) and where static stresses may be high (e.g., on threads).
- Repeatable modulus of elasticity (E).
The modulus of elasticity (which, in part, determines the wave
speed) should be repeatable among different lots of material.
Otherwise, the tuned dimension of the resonator will not be
consistent. This is a particular problem for titanium.
- Thermal conductivity.
Thermal conductivity should be high where heat transfer must be
maximized (e.g., in a front driver that transfers heat from the
piezoelectric ceramics and in certain plastic welding
applications where heat must be transferred from the part). In
some cases thermal conductivity should be low (e.g., to minimize
heat transfer from the load to the piezoelectric ceramics).
- Biological compatibility. This is a
requirement for surgical instruments.
- Machinability. This is the ease
with which the material can be machined.
- Safety. Some materials (such as beryllium)
pose health risks if improperly machined.
- Availability.
- Cost.
Materials for horns and boosters
The following table shows some common resonator materials and their characteristics.
Click the material name for additional information.
| Material |
Characteristics |
Typical uses |
| Titanium |
| Fatigue resistance ----------------------------------------------------------- |
High |
| Loss ----------------------------------------------------------- |
Moderate |
| Cavitation resistance ----------------------------------------------------------- |
Moderate |
| Wear resistance ----------------------------------------------------------- |
Moderate |
| Impact resistance ----------------------------------------------------------- |
Moderate |
| Chemical resistance ----------------------------------------------------------- |
Depends |
| Yield strength ----------------------------------------------------------- |
Moderate |
| Repeatable modulus E ----------------------------------------------------------- |
Moderate |
| Thermal conductivity ----------------------------------------------------------- |
Low |
| Biological compatibility ----------------------------------------------------------- |
High |
| Machinability ----------------------------------------------------------- |
Moderate |
| Cost ----------------------------------------------------------- |
High |
Note: Small holes can be difficult to tap because titanium tends to seize the tap.
|
- High amplitude horns for plastic and metal welding
- Medical probes
- Liquid processing
- Horns in the food industry
- Boosters (high gain)
|
| Aluminum |
| Fatigue resistance ----------------------------------------------------------- |
Moderate |
| Loss ----------------------------------------------------------- |
Low |
| Cavitation resistance ----------------------------------------------------------- |
Low |
| Wear resistance ----------------------------------------------------------- |
Low |
| Impact resistance ----------------------------------------------------------- |
Low |
| Chemical resistance ----------------------------------------------------------- |
Depends |
| Yield strength ----------------------------------------------------------- |
Moderate |
| Repeatable modulus E ----------------------------------------------------------- |
High |
| Thermal conductivity ----------------------------------------------------------- |
High |
| Biological compatibility ----------------------------------------------------------- |
Low |
| Machinability ----------------------------------------------------------- |
High |
| Cost ----------------------------------------------------------- |
Low |
|
- Horns (particularly larger horns)
- Boosters (medium & low gain)
- Transducer front drivers
|
| Tool steel |
| Fatigue resistance ----------------------------------------------------------- |
High |
| Loss ----------------------------------------------------------- |
High at high stress |
| Cavitation resistance ----------------------------------------------------------- |
High |
| Wear resistance ----------------------------------------------------------- |
High |
| Impact resistance ----------------------------------------------------------- |
High |
| Chemical resistance ----------------------------------------------------------- |
Depends |
| Yield strength ----------------------------------------------------------- |
High |
| Repeatable modulus E ----------------------------------------------------------- |
High |
| Thermal conductivity ----------------------------------------------------------- |
Moderate |
| Biological compatibility ----------------------------------------------------------- |
Low |
| Machinability ----------------------------------------------------------- |
Moderate |
| Cost ----------------------------------------------------------- |
Moderate |
|
- Inserting
- Soldering
- Metal welding
|
| Stainless steel |
| Fatigue resistance ----------------------------------------------------------- |
Moderate |
| Loss ----------------------------------------------------------- |
High at high stress |
| Cavitation resistance ----------------------------------------------------------- |
High |
| Wear resistance ----------------------------------------------------------- |
High |
| Impact resistance ----------------------------------------------------------- |
High |
| Chemical resistance ----------------------------------------------------------- |
Depends |
| Yield strength ----------------------------------------------------------- |
High |
| Repeatable modulus E ----------------------------------------------------------- |
Moderate |
| Thermal conductivity ----------------------------------------------------------- |
Moderate |
| Biological compatibility ----------------------------------------------------------- |
High |
| Machinability ----------------------------------------------------------- |
Moderate |
| Cost ----------------------------------------------------------- |
Moderate |
|
- Block horns, especially where tips are to be brazed or soldered to the horn
- Some medical probes
- Transducer back drivers
|
| Copper alloys |
- Tunes significantly shorter than most acoustic materials
- High loss
|
- Horns where tips are to be soldered to the horn
- Transducer electrodes
|
| Ceramic |
Brittle |
- High temperature applications
- Insulators for transducer piezoceramics
|
| Ferro-Tic |
Machinable carbide |
- Horns subjected to high wear
|
| Niobium (Nb) |
- Young's modulus is constant in the range of 20-1200 °C. (Eskin[1], p. 299) Thus, unlike other acoustic materials, the resonator's frequency remains relatively constant within this temperature range.
- The thin-wire wave speed is approximately 3460 m/sec so it tunes about 30% shorter than most acoustic materials (~5000 m/sec).
|
- Molten metal processing applications (particularly molten aluminum)
|
| Tungsten |
Young's modulus and density are approximately 3x steel. |
- Molten metal processing applications
- Transducer back drivers
|
| AlBeMet® |
- Low Poisson's ratio (0.17) and long thin-wire half-wavelength (240 mm @ 20 kHz) give superior amplitude uniformity.
- Expensive
|
|
The above table assumes that the materials have been heat treated (as appropriate) for the best properties.
Notes —
- For titanium and aluminum, the loss increases
approximately with the square of the stress (amplitude). For most other
materials the loss increases substantially faster. Thus, while these
other materials may perform acceptably at lower amplitudes, their loss
may be excessive at higher amplitudes.
- Most acoustic metals have a wave speed near 5000
m/sec (about 200,000 inches/sec). However, copper-based
materials (e.g., brass) have substantially lower wave speeds which results in shorter tuned lengths.
Some titaniums can be selected for lower wave speeds.
Materials for transducers
In addition to the above materials, the following may be used as
component parts for transducers.
- Piezoelectric ceramics
- Ferromagnetic materials - nickel, Premendur
- Electrode materials - nickel, brass, copper, beryllium copper
- Insulators - MACOR machinable ceramic
- Tungsten
Materials for wear or appearance
Except for D-gun and carbide, the following have thin layers which don't affect tuning.